Ø  承載環(huán)尺寸:8寸和12寸

Bearing ring size: 8 inches and 12 inches

Ø  三個上料工位；

Three loading work stations;

Ø  控制系統(tǒng)：工控機(jī)系統(tǒng)；

Control system: industrial control machine system;

Ø  ESD Fan；

Ø  FFU過濾器；

FFU filter;

Ø  UPS電源；

UPS power supply;

Ø  SECS/GEM 聯(lián)機(jī)

The SECS/GEM is brought online

Ø  每小時產(chǎn)能：≥100 片晶圓；

hourly capacity: ≥ 100 wafers;

Ø  機(jī)器指示：三色燈塔顯示機(jī)臺工作狀態(tài)

Machine indication: three-color lighthouse display console operating status